Fujian Deer Technology Company Ltd.
时时彩刷水稳赚的玩法|腾讯时时彩全天计划
Tel: +86 0597-5331188(Office Tel)
+86 0597-5331166/5331363 (Domestic Tel)
+86 0597-5332618( International Tel)
Fax:0597-5335599
E-mail: info@fjdeertech.com
Site:www.fjdeertech.com
Tetrafluoromethane
(electronic grade)
Tetrafluoromethane is a colorless, odorless, non-flammable, inert, compressed gas. It is the largest amount plasma etching gas in the microelectronics industry, can be widely applied to etch Silicon, Silicon dioxide, Silicon nitride, Phospho-silicate glass and Tungsten film materials. It is also used in the surface cleaning, solar cells, laser technology, gas-phase insulation, subzero refrigeration, leakage inspection agents, attitude control of cosmic rockets, and detergents in the printed circuits.
Electronic Grade CF4 Specification
Parameter Critical Assay | Unit | Deer Specification |
Tetrafluoromethane (CF4) | % | ≥ 99.9995 |
Oxygen (O2) | ppm v | ≤ 0.5 |
Nitrogen(N2) | ppm v | ≤ 2.0 |
Carbon Monoxide(CO) | ppm v | ≤0.3 |
Carbon Dioxide(CO2) | ppm v | ≤0.5 |
Sulfur Hexafluoride(SF6) | ppm v | ≤0.1 |
Total Fluorocarbon(TFC | ppm v | ≤0.3 |
Total Hydrocarbon(as CH4) | ppm v | ≤0.3 |
Moisture（H2O） | ppm v | ≤ 1.0 |
Acidity ( HF ) | ppm v | ≤0.1 |
Total contents of impurity | ppm v | ≤ 10.0 |
Packing: Various types optional.
时时彩刷水稳赚的玩法
Tel:0597-5331188 时时彩刷水稳赚的玩法|腾讯时时彩全天计划